9
|
J. H.
Park, H. C. Lee, Y. H. Park, Y. D. Kim, C. H. Ji, J. Bu, and H.J. Nam; A fully
wafer-level packaged RF MEMS switch with low actuation voltage using a
piezoelectric actuator, J. Micromech & Microeng. 16 (2006) 2281
|
8
|
H. C.
Lee, J. H. Park, J.Y. Park, H.J. Nam, and J. Bu; Design, Fabrication, and RF
Performances of Two Different Types of Piezoelectrically Actuated Ohmic MEMS
Switches, J. Micromech.& Microeng. 15
(2005) 2098
|
7
|
H.
C. Lee, J. Y. Park, and J. Bu; Piezoelectrically actuated RF MEMS DC contact switches
with low voltage operation, IEEE microwave components letter, 15 (2005) 202
|
6
|
H. C. Lee, J. Y. Park, K. H. Lee, Y.J. Ko, and J.
Bu; Silicon bulk micromachined high Q film bulk acoustic resonator devices with
Mo/AlN/Mo structures, Integrated ferroelectrics, 69 (2005) 323
|
5
|
H. C. Lee, J. Y. Park, K.H. Lee, and J. Bu;
Preparation of highly textured Mo and AlN Films using a Ti seed layer for
integrated high Q film bulk acoustic resonators, J. Vac. Sci. & Technol. B 22 (2004) 1127
|
4
|
H.C. Lee and W.J. Lee; Characterization of
Pb(Zr,Ti)O3 thin films fabricated by plasma enhanced
chemical vapor deposition on Ir-based electrodes, J. Vac. Sci. & Technol. A
20
(2002) 1939
|
3
|
H. C. Lee and W. J. Lee; Preparation and
Characterization of Pb(Zr,Ti)O3 Films Deposited on Pt/ RuO2
Hybrid Electrode for Ferroelectric Random Access Memory Devices, Jpn. J. Appl.
Phys. 40
(2001) 6566
|
2
|
J. Hong, H.W. Song, H.C. Lee, W.J. Lee, and K. No;
Structure and electrical properties of Pb(ZrxTi1-x)O3
deposited on textured Pt thin films, J.Appl. Phys. 90 (2001) 1962
|
1
|
S.O. Chung, H.C. Lee, and W.J. Lee; Effects of
Electrodes on the Electric Properties of Pb(Zr,Ti)O3 Films Deposited by Electron
Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition, Jpn. J. Appl. Phys. 39 (2000) 1203
|
|