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9

J. H. Park, H. C. Lee, Y. H. Park, Y. D. Kim, C. H. Ji, J. Bu, and H.J. Nam; A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator, J. Micromech & Microeng. 16 (2006) 2281 

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8

H. C. Lee, J. H. Park, J.Y. Park, H.J. Nam, and J. Bu; Design, Fabrication, and RF Performances of Two Different Types of Piezoelectrically Actuated Ohmic MEMS Switches, J. Micromech.& Microeng. 15 (2005) 2098 

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H. C. Lee, J. Y. Park, and J. Bu; Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation, IEEE microwave components letter, 15 (2005) 202 

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H. C. Lee, J. Y. Park, K. H. Lee, Y.J. Ko, and J. Bu; Silicon bulk micromachined high Q film bulk acoustic resonator devices with Mo/AlN/Mo structures, Integrated ferroelectrics, 69 (2005) 323 

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H. C. Lee, J. Y. Park, K.H. Lee, and J. Bu; Preparation of highly textured Mo and AlN Films using a Ti seed layer for integrated high Q film bulk acoustic resonators, J. Vac. Sci. & Technol. B 22 (2004) 1127 

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H.C. Lee and W.J. Lee; Characterization of Pb(Zr,Ti)O3 thin films fabricated by plasma enhanced chemical vapor deposition on Ir-based electrodes, J. Vac. Sci. & Technol. A 20 (2002) 1939 

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H. C. Lee and W. J. Lee; Preparation and Characterization of Pb(Zr,Ti)O3 Films Deposited on Pt/ RuO2 Hybrid Electrode for Ferroelectric Random Access Memory Devices, Jpn. J. Appl. Phys. 40 (2001) 6566 

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J. Hong, H.W. Song, H.C. Lee, W.J. Lee, and K. No; Structure and electrical properties of Pb(ZrxTi1-x)O3 deposited on textured Pt thin films, J.Appl. Phys. 90 (2001) 1962

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S.O. Chung, H.C. Lee, and W.J. Lee; Effects of Electrodes on the Electric Properties of Pb(Zr,Ti)O3 Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition, Jpn. J. Appl. Phys. 39 (2000) 1203

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