LECTURE

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Piezoelectric and magnetic drive
10. Piezoelectric and magnetic drive
2020-04-16
Thermal and piezoresistive drive
9. Thermal and piezoresistive drive
2020-04-16
Electrostatic sensing and actuation
8. Electrostatic sensing and actuation
2020-04-16

PUBLICATIONS

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S.W.Kim, H.S.Lee, D.S.Jun, S.E.Lee, J.H.Lee, H.C.Lee; Enhancing the Plasma-Resistance Properties of Li2O?Al2O3?SiO2 Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorporation, Materials. 16 (2023) 5112
S.W.Kim, H.S.Lee, D.S.Jun, S.E.Lee, J.H.Lee, H.C.Lee; Enhancing the Plasma-Resistance Properties of Li2O-Al2O3-SiO2 Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorporation, Materials. 16 (2023) 5112 
J.H.Yoo, W.J.Park, S.W.Kim, G.R.Lee, J.H.Kim, J.H.Lee, S.H.Uhm, H.C.Lee; Preparation of Remote Plasma Atomic Layer-Deposited HfO2 Thin Films with High Carge Trapping Densities and Their Application in Nonvolatile Memory Devices, Nanomaterials. 13 (2023) 1
J.H.Yoo, W.J.Park, S.W.Kim, G.R.Lee, J.H.Kim, J.H.Lee, S.H.Uhm, H.C.Lee; Preparation of Remote Plasma Atomic Layer-Deposited HfO2 Thin Films with High Carge Trapping Densities and Their Application in Nonvolatile Memory Devices, Nanomaterials. 13 (2023) 1785
J.H.Lee, G.S.Lee, E.N.Park, D.H.Jo, S.W.Kim, H.C.Lee; Synthesis of Planar-Type ZnO Powder in Non-Nano Scale Dimension and Its Application in Ultraviolet Protection Cosmetics, Materials. 16(2023) 2099
J.H.Lee, G.S.Lee, E.N.Park, D.H.Jo, S.W.Kim, H.C.Lee; Synthesis of Planar-Type ZnO Powder in Non-Nano Scale Dimension and Its Application in Ultraviolet Protection Cosmetics, Materials. 16 (2023) 2099
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반도체 플라즈마공정 연구실 (Semicon Plasma Process LAB)를 소개합니다.

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반도체 플라즈마공정 연구실 (Semicon Plasma Process LAB)의 연구내용을 소개합니다.

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반도체 플라즈마공정 연구실 (Semicon Plasma Process LAB)의 구성원을 소개합니다.

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